Automated Sputtering Target Production

ABSTRACT

A system and method are provided for manufacturing a sputtering target. The system is preferably automated. Sub systems of the manufacturing system include a robotic part handling sub system, a weighing sub system adapted to measure the weight of a part to be manufactured into a sputtering target, and a machining sub system adapted to finish machine a part to be manufactured into a sputtering target. The system can further include a cleaning sub system adapted to clean a part to be manufactured into a sputtering target, an inspection sub system adapted to measure dimensions of a part to be manufactured into a sputtering target, and a feedback control sub system adapted to provide control signals to one or more of the robotic handling sub system, the weighing sub system, the cleaning sub system, and the inspection sub system to control processing performed by one or more of the sub systems.

INTRODUCTION

This application claims the benefit of U.S. Provisional PatentApplication Nos. 60/644,929 filed Jan. 19, 2005; 60/656,978 filed Feb.28, 2005; 60/657,054 filed Feb. 28, 2005; 60/657,263 filed Mar. 1, 2005;60/646,244 filed Jan. 24, 2005; and 60/656,977 filed Feb. 28, 2005, allof which are incorporated in their entirety by reference herein. Thepresent invention relates to a system and method for manufacturingsputtering targets. The system is preferably automated in part or in itsentirety.

SUMMARY

According to various embodiments, a system for manufacturing asputtering target is provided comprising a plurality of sub systems thatare designed and/or integrated to receive and process work pieces madefrom materials suitable for sputtering, for example, tantalum orniobium. The work pieces can be received already partially machined orwith no prior machining, and the system according to various embodimentsof the present teachings can provide for further processing to transformthe work pieces into their final form, for use as sputtering targets.

The system and method according to various embodiments of the presentteachings can process at least two different styles of product toproduce the final sputtering targets. A work piece from which asputtering target can be produced can be in the form of a circular flatdisk, and if desired, the circular flat disk can be supported on abacking plate, wherein the backing plate can provide a means for holdingthe work piece during further processing. The circular flat disk type ofwork piece can be referred to as “disk type,” and can be obtained in itspreliminary machined form from monolithic or bonded assembly. A secondstyle of work piece that can be manufactured into a sputtering targetcan be referred to as an “HCM” style product, or Hollow CathodeMagnetron style product. The HCM style product can be in the form of acylindrically-shaped work piece, closed at one end, for example, atop-hat shaped work piece, and can comprise a peripheral flange that canprovide a contact surface for holding the work piece during furtherprocessing without contacting the critical machined surfaces of the workpiece.

A system for manufacturing a sputtering target, according to variousembodiments, can comprise a plurality of sub systems, including, but notlimited to, a robotic part handling sub system, a machining sub system,a weighing sub system adapted to measure the weight of a part to bemanufactured into a sputtering target, a grit blasting and arc spray subsystem for applying particle trap surfaces to the sputtering target, acleaning sub system adapted to clean a part to be manufactured into asputtering target, an inspection sub system adapted to measuredimensions, surface finish and cleanliness of a part to be manufacturedinto a sputtering target, a helium leak check sub system for testing thevacuum integrity of the part, a packaging sub system for packaging thepart in an at least class 100 inert gas environment, and a feedbackcontrol sub system adapted to provide control signals to one or more ofthe robotic handling sub system, the weighing sub system, the cleaningsub system, and the inspection sub system to control processingperformed by one or more of the sub systems.

The sub systems that make up the system according to various embodimentsfor manufacturing a sputtering target can be arranged at variousstations, and the stations can be separated into one or more zones. Afirst zone can be provided comprising a plurality of stations, each ofwhich can include a sub system for processing a work piece that is to bemanufactured into a sputtering target.

A multi-tooled robot on a servo-controlled rail can be provided totransfer a work piece through a first zone comprising one or more of thefollowing stations: an on-load station, a pre-machining weigh station, acomputer numerically controlled machining station adapted to machine thework piece to desired specifications, a post-machining weighing, markingand mark-verification station, a degrease cleaning and drying station, apart transfer station, an ultrasonic thickness measurement and endeffector cleaning station, a helium mass spectrometer leak test station,a part holding station, an arc spray and grit blast station, and a parttransfer station for transferring the work piece to a further cleaningzone. The further cleaning zone can comprise one or more of thefollowing stations: an ultrasonic cleaning station, a nitrogen cleantunnel system, wherein the nitrogen clean tunnel system can comprise oneor more of a part drying oven, a part cooling system, a part transfersystem, a cleanliness and surface finish inspection system, a rejectconveyor, and a bagging station.

Additional features and advantages of the present teachings will be setforth in part in the description that follows, and in part will beapparent from the description, or may be learned by practice of thepresent teachings. The objectives and other advantages of the presentteachings will be realized and attained by means of the elements andcombinations particularly pointed out in the description that follows.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory onlyand are intended to provide a further explanation of the presentteachings.

DESCRIPTION OF VARIOUS EMBODIMENTS

A sputtering target manufacturing system according to variousembodiments of the present teachings can comprise a plurality of subsystems designed and/or integrated to receive rough formed metal piecesand process them to their final form, as sputtering targets. Twodifferent styles of product, disk type and HCM, can be manufactured onthe system. The targets can have any metal purity, texture, shapes,and/or grain size.

A multi-tooled robot on a servo-controlled rail can transfer the work inprocess through Zone 1, which can comprise an on-load station, apre-machining weigh station, a CNC machining station, a post machiningweighing, part marking and marking verification station, a degreaseclean and dry station, a part transfer station, a vacuum cup endeffector and stand, an ultrasonic thickness measurement and end effectorcleaning station, a helium mass spectrometer leak test station, a partholding station, an arc spray and grit blast station, and a parttransfer system adapted to transfer a work piece from Zone 1 into a Zone2 that can comprise a Class 1000 or better Ultrasonic Cleaning Station.

A series of gantry robots, a class 100 clean room conveyor, and variouslift devices can transfer the work piece through Zone 2, which cancomprise the Class 1000 Ultrasonic Cleaning Station, and a Class 100 orClass 10 Nitrogen Clean Room System. The Class 100 or Class 10 NitrogenClean Room System can comprise a part drying oven, a part coolingsection, a part transfer system, a cleanliness and surface finishinspection, a reject conveyor, and a bagging station.

A data management system can be coupled with the manufacturing system.The data management system can track work in process, record pertinentdata, coordinate the various sub system's operation and provide aninterface for system performance and operation. The entire system can bedesigned such that minimal human intervention is required while insuringsafe, reliable, and repeatable processing of the disk type and HCMproducts or other work pieces to be manufactured into finishedsputtering targets.

The sputtering target manufacturing system according to variousembodiments can be designed and manufactured to allow automated and/ormanual process steps for finishing disk type components, HCM components,and/or other work pieces suitable for sputtering targets, whereininspection and component data tracking can be performed for all finishedproducts, and one finished product can be produced approximately every20 minutes.

The sputtering target manufacturing line can comprise sub systems andstations for processing up to four or more basic sizes of finishedproduct that can include two sizes of disk type parts and two sizes ofHCM parts, with several material variations being possible within thesefour basic sizes.

The disk type parts can be provided to the manufacturing line accordingto various embodiments on pallets or other similar transport devices.The preliminarily machined surface of desired sputtering material, forexample, tantalum or niobium, can be oriented on the pallet with themachined side up. According to various embodiments, the disk type partscan be provided to the manufacturing line pre-machined in order toassure that the surface of the work piece opposite from the sputteringsurface, for example, a surface comprising copper or an alloy thereof,is parallel to the sputtering surface to provide a circular disk ofconstant thickness. The preliminary machining can include the completefacing of the copper or copper alloy side opposite from the sputteringside, and preliminary machining of the final outer diameter of the part,such that the part does not require removal from the CNC machine usedduring the final processing in order to turn the part around and machinethe other side in the CNC machine. According to various embodiments, thedisk type can be machined on the copper or copper alloy side in anoffline process so it does not need to be flipped in the CNC machiningcenter. The disk type work piece can be gripped or handled on theoutside diameter of a peripheral flange that can be preliminarilymachined into the work piece. The gripping or handling can be performedusing specially designed gripper jaws or other end effectors, forexample, a vacuum end effector.

According to various embodiments, the HCM parts can be provided to themanufacturing line on pallets or other similar transport devicesoriented with the open end of the work piece facing downward toward thepallet or transport device. The HCM parts can also be gripped andhandled on the outside diameter of a peripheral flange premachined intothe work piece using gripper jaws or other end effectors, for example, avacuum end effector.

According to various embodiments, parts to be processed during one shiftat an incoming product load station can be positioned within the loadingarea, and an operator can utilize a crane and hoist to transfer theparts from the pallets to locating fixtures. Once the locating fixturesare loaded the system can be started and a robot can remove parts fromthe locating fixtures and move them to various process stations asrequired.

The incoming product load station can comprise a staging area forincoming product pallets suitable for one shift of plant production, forexample, 7 parts. In this example, seven universal part fixtures can beprovided to stage and position one shift of production parts for therobotic material handling system. A powered gravity roller conveyor canbe provided to handle rejected parts, and can be, for example, 10 feetlong, to allow parts rejected within the process to be staged for manualremoval. A floor supported bridge crane workstation can be provided, forexample, with a bridge length of approximately 10 feet and a runwaylength of approximately 23 feet, and can be supported using four cornercolumns at a height of approximately 12 feet. Total bridge crane loadingcapacity can be approximately 2000 Lbs (including lift hoist, vacuumlift end effector and product). The incoming product load station canfurther comprise an electric chain hoist that can be attached to thebridge crane. The hoist can feature a lift capacity of approximately2000 Lbs. One of ordinary skill in the art will recognize that thenumber of parts handled during a shift, the load capacities of handlingequipment, and the dimensions of handling equipment including conveyorsand cranes as referred to in these examples are exemplary only, and arenot in any way limiting on the variety of different shift capacities,load capacities, and dimensions of the work piece handling equipment,including cranes and hoists, that can be employed within the scope ofthe present teachings. A mechanical vacuum lifting mechanism can also beprovided for handling the work pieces, and can comprise a compressed airpowered vacuum generator and check valve, and a custom pad attachmentand battery powered leak detector. A manually operated generator can becapable of handling up to approximately a 750-pound lift capacity.

According to various embodiments, a material handling device for allstations included in the system outside of a downstream clean roomenvironment can be, for example, a Fanuc 6 Axis Robot mounted to alinear robot transport unit (RTU) or rail (for example, the FanucM-900iA series of robots.) The robot on the rail can utilize a specificend of the arm gripper mechanism to lift and position disk type or HCMproducts to and from the various staging and process stations within thesystem. In some operations where the robot can be required to invert thepart prior to loading at the next station, the robot's 6-axis capabilityalong with a special static invert fixture can be utilized. The fixturecan be designed such that it allows the robot to position and drop offthe part to be inverted in a “vertical axis” orientation in the fixture,which then allows the robot to reposition itself on the opposite end ofthe part for regripping and retrieval. Product movement in the systemcan include the loading and unloading of all sub system equipment withthe exception of the operator loading products to the staging fixturesat the incoming product load station, which can be handled by the Fanucrobot/RTU system.

According to various embodiments, the Fanuc M-900iA series of robots canbe engineered for precision, user-friendly setup and maximumreliability. The robots can be supported by Fanuc's extensive serviceand parts network. The M-900iA can be a 6-axis, modular construction,electric servo-driven robot with a load capacity of 350 kilogramsdesigned for a variety of manufacturing and system processes.

Some desirable features of the Fanuc M-9001A include wrist designsuitability for harsh environments, small robotic footprints and reducedcontroller size to conserve space, slim arm and wrist assemblies tominimize interference with system peripherals and allow operation inconfined spaces, allow wrist moments and inertias to meet a variety ofheavy handling challenges, and ease of integration and reliability whileproviding the highest uptime and productivity. Further features caninclude longer maintenance intervals, which can equate to loweroperating costs, robust mechanical design features that can reduce downtime, increase mean time between failure (MTBF) and minimize spare partrequirements, and the use of high performance motion yielding fast cycletimes and high throughput.

According to various embodiments, features of the Fanuc M-900iA seriesof robots can include multiple controller type and mountingcapabilities, a 6 axis of motion, and a slim profile design. Control ofthe Fanuc M-900iA series of robots can include a quick change amplifier(<5 minutes), a fast boot time (<30 seconds), a standard Ethernet Port,a PCMCIA Software distribution, and easy connections to a variety ofI/O, including a number of distributed I/O networks.

According to various embodiments, the software of Fanuc M-900iA seriesof robots can include processing specific software packages for variousapplications, web-based software tools for remote connectivity,diagnostics and production monitoring, and machine vision for robotguidance and inspection.

According to various embodiments, the robotic transfer unit (RTU) can bea single carriage heavy duty, floor-mount that is approximately40-inches wide. The RTU can transport the FANUC M-900iA robot andrelated equipment with a maximum static load rating of less than6,000-lbs. including robot, payload, and peripherals. A center mountedcable carrier is included.

According to various embodiments, the end effector for the system caninclude a custom designed product specific part gripper assembly, onefor both disk type and HCM products. The end effector can containvarious active and static tooling features such as a direct currentelectric powered linear actuator, a vacuum holding device, and a fixedreference tooling feature to perform the gripping, locating, and holdingfunctions as required during the loading and unloading of productswithin the system. The end effector can be designed to accommodate allsizes of parts in the part families. The end effector's gripping andlocating mechanisms can allow it to grip the parts from either the topor the bottom as needed for machine tool loading/unloading, invert overmechanism loading/unloading, and other process equipmentloading/unloading requirements.

According to various embodiments, a further sub system can comprise aweighing station, wherein the weighing station can comprise a scale thatcan be used to weigh each part as they first enter the system prior toloading for the next operation in both disk type and HCM products. Thescale can compare the actual weight of the selected part with theexpected correct raw part weight stored within the system controller.Acceptable parts are sent on for further processing by the system. Inthe event of an improperly positioned part by the operator, the scalecan identify the incorrect part and can signal the robot to reject thepart.

According to various embodiments, the weighing station can comprise aCardinal Floor Hugger scale mounted to the plant floor close to theincoming product load station. The Cardinal scale can have a platformsize of 3 feet×3 feet with output graduations in increments of 0.2 lbs.The scale features can include a smooth top plate, four hermeticallysealed stainless steel load cells, trim resistors for section sealing inaddition to calibration adjustments in weight displays, self-checkingload cells, and adjustable leveling feet mounted to each load cell. Thescale can be equipped with an indicator type operator display and caninclude an interface card to allow communication with the controlsystem. Parts can be placed into and retrieved from nest fixturesattached to the scale top plate by the robot. It can be assumed that rawpart weights for all products, styles, sizes, and materials differ by asufficient amount to allow the scale to detect an incorrect product partwhen weighed.

According to various embodiments, an impact printer can also beprovided, wherein the printer can be adapted to engrave a desired word,for example, “CABOT”, a desired logo, the customer part number, therevision, and the serial number. A Telesis single pin impact printer caninclude a 1½″×2½″ marking window capable of dot matrix characters in avariety of sizes and styles with dot density from about 10 to 200 dotsper inch and can be held in position by a robot. Disk type parts can bemarked on the back and HCM parts can be marked on the circumference ofthe flange.

According to various embodiments, a further downstream sub system cancomprise a degrease and clean station and a drying station that canaccept both disk type and HCM parts from upstream computer numericallycontrolled machining centers and can process them one at a time toremove residual cutting fluids, chips and other debris from themachining process. An example of a desirable degrease and clean stationand drying station is the Alliance “Aquamate SF”, which is a top loadingcabinet-style part cleaning system designed for batch processing for lowvolume parts cleaning. The SF-Series can offer easy top loading. Acanopy can be hinged at the rear of the machine. When open, the frontedge of the canopy can be beyond the center of a turntable, allowing apart to be loaded/unloaded by the material-handling robot for fastefficient cleaning. The part can be stationery and a spray nozzle canmove around the part to perform the degreasing and cleaning. An airknife can be provided to pass over the part after cleaning for drying ofthe part. The custom top loading type cabinet washer can includestainless steel construction, automatic canopy opening and closing,multiple spray nozzle cleaning, full cascade rinse, and heated airblow-off cycles. The corrosion-resistant spray system can feature anadjustable “clip-on” nozzle for easy maintenance, a vertical seal lesspump, auto-fill piping, and a level control with low water safetyshut-off. The system can feature a recirculating wash and rinse pumpsystem with solution filtration and can incorporate removable strainerbaskets and filter screens for 100% filtration of all solutions. TheAlliance system can be a stand-alone system controlled by an AllenBradley programmable logic controller (PLC) with communication to themain system controller. Control panels can be NEMA 12, designed andassembled to meet NEC standards.

According to various embodiments, a leak test station can be provided atwhich an helium mass spectrometer leak test can be performed on all HCMparts to detect leak paths through the flange welds of all finishedmachined HCM parts. The station can consist of an HCM specific leak testfixture/chamber designed to accommodate both sizes of HCM parts, atleast one Varian Helium Leak Detector instrument, and an appropriatepump, valve, pressure transducer, and regulator to connect the leak testcircuitry to the test fixture/chamber. A blower can be connected to thetest circuit and fixture/chamber and can be utilized to purge remaininghelium from test circuits and fixture/chamber areas following the testcycle. Test fixture/chamber can utilize o-ring seal designs for sealingthe test chamber on the HCM parts. Additionally, the HMS test equipmentcan be integrated to a machine frame to provide a complete test cell.The HMS Leak Test station can be a stand-alone system controlled by anAllen Bradley PLC with communication to the main system controller.

The helium mass spectrometer leak test system can also be used to testthe vacuum integrity of the o-ring seal on the disk type or HCM styleparts.

According to various embodiments, dimensional inspection can beperformed on all disk type and HCM parts for conformance to partgeometry and tolerance of all finished machined parts. The Mitutoyo CMMMachine can have a work cell range to accommodate all 7 parts and usesthe latest technologies.

According to various embodiments, the CMM System can communicate with anelectronic device through Digital I/O and file outputs in the systemdatabase. Additionally, a custom fixture can be mounted to the CMM tableto accept the part for measurement.

According to various embodiments, a further downstream processingstation can be provided with a grit blast machine that can be designedto automatically etch the outer flange area of the work pieces (disktype parts and HCM parts.) The machine configuration can include anacoustical steel cabinet to enclose the grit blast process. Mounted onthe front of the grit blast cabinet can be a vertical sliding door. Thisfixture can automatically open access to the cabinet for part loadingand retract to remove parts once the cycle is completed. The partfixtures can include a spindle fixture that rotates the parts during thegrit blast process. According to various embodiments, the machinecontroller can send a signal to the machine to indicate what style partis to be processed. The part to be grit blasted can be placed into thefixture by the robot end effector. When the part is properly loaded ontothe fixture a separate Fanuc LR Mate robot will then load the requiredmasking. The fixture can begin to rotate and the grit blast nozzle canbe turned on to etch the flange area of the part. When grit blasting iscomplete, the media flow to the nozzle can be turned off and compressedair can be used to remove residual abrasive from the part. After thepart is blown off, the spindle rotation stops and the door opens. TheFanuc M16i overhead robot can remove the masking, and a second blow offoperation can be completed. Spent media can be blown off the partsbefore the parts are unloaded from the cabinet. The M900i robot on therail can remove the finished part from the fixture.

According to various embodiments, the grit blast machine can provide themost uniform and reliable blasting performance possible. Spent media canbe recovered pneumatically from the hopper-shaped floor of the cabinet.A cyclone can remove the fines and dust from the reclaimed media. Ascreening system can be used to insure that a consistent media size isalways provided to the blast nozzles. The grit flow rate to the blastnozzle can be monitored and the air pressure to the blast nozzle can beclosed-loop controlled. As media breaks down from the blast process itcan be replenished with new media. An Allen Bradley PLC can be providedto control the operation of the machine. The operator interface can be amonitor connected to the controller.

According to various embodiments, a further downstream station can beprovided comprising an arc spray machine that can be designed toautomatically apply an aluminum coating or other coating to the outerflange of a work piece, for example, the disk type parts. The arc spraymachine can operate very much the same as the grit blast machine. Avertical door can open to allow parts in and out of the machine. Whenthe parts are in the machine's fixture, they rotate beneath an arc spraygun for a precise amount of time to build up the proper coating. Whenthe arc spray process is complete the parts are unloaded with a robot.As with the grit blast machine, the arc spray machine can be controlledwith an Allen Bradley PLC. The masking can be loaded and unloadedautomatically as described in the grit blast section.

According to various embodiments, a further downstream zone comprising adownstream cleaning sub system can comprise equipment sections,stations, and positions inside a nitrogen tunnel/clean room portion ofthe system which can include the nitrogen tunnel with its entrance andexit antechambers. A Portable 1000 Clean Room with an ultrasoniccleaning system can include a cleaning section for an ultrasonic bathwith laminar flow, including a Lexan side wall, a support structure, adoor, and a HEPA filtration with monitoring. Products can enter thenitrogen tunnel system and travel through a cleaning process that cancomprise a four station cleaning system of three deionized (D.I.) watercleaning and rinse tanks plus a filtered air blow off tank. Both disktype and HCM parts can be retrieved from the conveyor by the gantryrobot and submerged in the Ambient Water Rinse Tank with D.I. water. Thegantry robot can then move the part into the ultrasonic cleaning tankfor a specified time period. After removal from the ultrasonic tank, thegantry robot can move the part to a heated rinse tank. The part can beplaced into the air blow dry tank by the gantry robot. Filtered air canbe used to blow the part dry. Part orientation during the cleaningprocess can be maintained to maximize draining and minimize watercapture, and the part can be repositioned back onto the conveyor travelposition after blow drying by the gantry robot. The cleaning equipmentcan be enclosed in the portable Clean Room with the internal environmentequaling a class 1000 (or better) cleanroom. Transport of the parts fromprocess to process as listed above can be by a Gantry Robot systemequipped with a custom end effector to grip the outside diameter of theperipheral flange on the parts. Parts returning to the conveyortransport system enter the drying oven section of the nitrogen tunnelfollowing the blow-dry cycle for a 2 hour drying process. The ultrasoniccleaning tank section can comprise a first station: ambient D.I. WaterRinse with an approximate tank size of 30″ Front to Back×32″ Left toRight×34″ deep, 4-sided overflow weir, a resistivity monitor with analarm, a cove corner, and a sanitary heat exchanger to cool water beforeentering the tank. The ultrasonic cleaning tank section can furtherinclude a second station comprising: hot temperature ultrasonic cleaningwith an approximate tank size of 30″ Front to Back×32″ Left to Right×34″deep, 40 KHz Ultrasonic, a 4-Sided overflow weir, a low level safety, anovertemp safety, a resistivity monitor with alarm, and cove corners. Theultrasonic cleaning tank section can further include a third stationcomprising: hot D.I. water rinse with an approximate tank size of 30″Front to Back×32″ Left to Right×34″ deep, a 4-sided overflow weir, aresistivity monitor with alarm, and cove corners. The ultrasoniccleaning tank section can further include a fourth station comprising:filtered air blow dry with parallel opposed blow-off headers.

According to various embodiments, a nitrogen tunnel can be utilized toenclose a portion of a process line that can be specified as a class 100clean room classification. The nitrogen tunnel can utilize a slidingdoor type entry and exit section, and a section barrier entry door asrequired to separate and maintain minimal cross contamination betweenvarious process chambers, while allowing part movement between thedifferent process sections. The nitrogen tunnel can be a custom designedsystem that can enclose a Nitrogen Tunnel Conveyor System, a DryingOven, one or more Nitrogen Tunnel Gantry Systems, a CleanlinessInspection, a Surface Finish Inspection Station, and a Nitrogen TunnelBagging Section. The Drying Oven section can incorporate the NitrogenTunnel equipment providing filtered nitrogen at ≧77 Degrees C. (170Degrees F.) for at least two hours. The nitrogen tunnel can include anautomatic door to the drying oven, a drying oven chamber that caninclude a laminar flow and all associated components, and an exitchamber door from the drying oven. The nitrogen tunnel can furtherinclude a cooling section for cooling parts with laminar flow, aninspection and handling that can include a nitrogen purge, a box, aplate, and an antistatic window. The nitrogen tunnel can further includean exit ante-chamber for rejected parts, a bagging station Glove Boxwith laminar flow that includes boxes, plates and antistatic windows, anexit ante-chamber door for good parts, an environmental control for theentire nitrogen tunnel system, and an Nitrogen Tunnel Conveyor System.

According to various embodiments, Clean Room Rated Conveyor sections canbe used to transport parts, both disk type and HCM into, through, andout of the nitrogen tunnel/clean room portion of the system allowing theparts to ride directly on the conveyor rollers without the use of anypart pallets or fixtures. The Slip-Torque conveyor units can providetransportation of disk type and HCM products, in a single lane, forinstance, at a conveyor speed of approximately 10 feet per minute and arate of 3 parts per hour. Other speeds can be used.

According to various embodiments, the conveyor units can be utilizedinside the nitrogen tunnel including Shuttleworth's Slip-Trak, class 100clean room, chain driven conveyor, and can further include an extrudedaluminum frame, a solid black 21 mm roller on 22.7 mm center, and analuminum bushing cover. A Slip-Trak, class 100 clean room conveyor withadditional components to meet the preferred 170 degree F. specificationcan be located in the drying oven portion of the nitrogen tunnel.

According to various embodiments, the Nitrogen Tunnel Gantry can consistof two separate gantry robots, one for transporting parts through theUltrasonic Cleaning Section, and one to transport parts through theCleanliness and Surface Inspection area. Both Gantry Systems canincorporate the use of several Servo Driven clean room motors for mostof the linear motion in the system. The custom end effector tooling canbe designed to grip the outside diameter of the flange on the parts. Thesecond gantry located near the Cleanliness and Surface Finish Inspectioncan be the same style construction as the one utilized in the UltrasonicCleaning area. The sizing of the unit varies however. Disk type and HCMproducts can exit the cooling section and can be positioned for pick upby the second gantry robot. The parts can be lifted from the conveyorusing a vacuum end effector and placed onto the inspection fixture. Theinspection process first inspects the part for Cleanliness, and thenperforms a Surface Finish Inspection.

According to various embodiments, the Cleanliness Inspection can consistof two identical sets of cleanliness inspection equipment, onepositioned over the fixture to inspect the tantalum (or other metal)area of the disk type parts from above, and one positioned under thefixture to inspect the tantalum (or other metal) area inside the HCM“Bowl” from below the fixture. The inspection process can illuminate thepart surface with the ultraviolet light source using the visioninspection camera with a fixed focal length lens inspecting for “UncleanAreas” on the metal. The two sets of cleanliness inspection equipmentcan comprise a UV light source that can be mounted to illuminate asevenly as possible the tantalum (or other metal) surface of the partfrom a fixed rigid mounting position along with a vision inspectioncamera that can be positioned to focus on as much as possible thesubject area of the tantalum (or other metal) surface from a fixed rigidmounting position.

According to various embodiments, the Surface Finish Inspectionequipment can utilize the same part fixture and can be initiatedfollowing a satisfactory cleanliness inspection process. Surface Finishof the parts can be checked using a finish inspection probe mounted on athree axis slide with a rotary actuator; one for the probe can be overthe fixture to inspect the tantalum (or other metal) area of the disktype parts from above, and in the second position one can be under thefixture to inspect the vertical wall of the tantalum (or other metal)area inside the HCM “Bowl” from below the fixture. The surface finishinspection probe can be mounted to multi axis programmable servo drivenlinear slides to move the inspection probe into and out of theinspection area so as to not interfere with the previous cleanlinessinspection process.

An alternative method of conducting the cleanliness inspection can be touse a laser and measure the specular and diffuse reflectance from thesputtering target surface. This same technique is used to inspectparticle contamination on silicon wafers in the integrated circuitmanufacturing process. KLM Tencor manufactures this type of equipmentfor silicon wafer inspection.

A further alternative method for cleanliness inspection is to use avacuum device to pull air and particles from the surface and measure theparticle content in the air stream.

The ultraviolet method for cleanliness inspection has an inherent speedadvantage over the alternative methods.

According to various embodiments, acceptable parts are transferred bythe gantry robot to the conveyor going to the Nitrogen Tunnel BaggingSection upon completion of the surface finish inspection while rejectsare placed on the conveyor to the reject discharge “antechamber” and outof the nitrogen tunnel for manual removal from the system.

According to various embodiments, the Nitrogen Tunnel Bagging Sectioncan be a nitrogen tunnel fitted with a glove box on two sides and can beused to manually place finished acceptable disk type and HCM parts intofirst an inner clean shipping bag and second an outer clean shipping bagto provide a double bagged finish part prior to the part exiting theNitrogen Tunnel. The acceptable parts can enter the bagging section ofthe nitrogen tunnel via the Slip Trac conveyor after passing both finalinspections. The part can be positioned at the first bagging stationwhere a lift device elevates the part off of the conveyor surface. Theoperators can retrieve a bag from a supply of bags placed previouslyinside the tunnel, and working through the glove box, slip the bagmaterial over the part and the lift device. The bag can be placed on thelift device, vacuum heat sealed, returned to the conveyor, andtransferred off of and away from the lift device to a second position.The operator can position the open end of the bag for sealing andactuate the bag sealer to complete the first layer of bagging. The partand bag can travel to the first lift device and then the process can berepeated over the inner bag. The completed part with double bags cantravel through the exit “Antechamber” to the unload position for removalfrom the system and loading to the final shipping container.

According to various embodiments, the automated process equipment ateach station can be mounted on heavy-duty steel bases (e.g., hot rolled)and component risers as necessary. The steel bases can provide a solidmounting and reference surface to build up the custom equipment requiredat each station. The mounting base tops and other impact surfaces can beblanchard ground, shot-peened, and/or painted as the application allowsor blanchard ground and plated and/or clad as the application demands.(Such demands are typically due to size limitations or constant exposureto substances that can be “caustic” to painted surfaces).

According to various embodiments, other custom fabricated metalcomponents can be appropriately coated to prevent oxidation and wear.One or more of a variety of coatings, for example, paint, black oxide,anodization, electroless nickel, flash chrome, or thin dense chrome canbe used. Hardened steel touch tooling or wear surfaces can be platedwith thin dense chrome (TDC), which can produce a very hard-finishedsurface (approximately Rockwell #C70). Equipment mounting structures canbe painted to any specifications.

According to various embodiments, all system programs can be codedaccording to Advanced Automation's strict coding standards in a modularformat. By following this standard, each program (and its subroutines)can be formatted as a logical “state-machine”, a programming style thatproduces easy to understand, logically flowing sequences. Using thismethod can improve the readability and ease of maintenance of the code.

According to various embodiments, the machine logic can be implementedas an event-based rather than time-based control algorithm. Automatedequipment can include feedback sensors to verify performance ofscheduled actions. For instance, grippers do not close until apick-and-place downstroke can be completed and a component can bepresent in the fixture. As a matter of design practice, systemstypically can include sensors at both ends of an actuation, extendingpositions to make sure they got there, and then retracting positions tomake sure they come back. Sensors can include verifying that parts canbe present in escapements and grippers only when they should be.Sequencing failures can be thus diagnosed and reported.

According to various embodiments, sub-supplier equipment can beprogrammed according to their internal standards, and preferably hascommon interface with the rest of the system. All sub-supplier equipmentcan be “slaved” to the “zone controllers” provided by AdvancedAutomation.

According to various embodiments, the system can be built withcontrols-interlocked guarding to ensure personnel safety duringoperation, generally using safety rated keyed interlock switchcomponents with solenoid latching. Interlock switches can be generallyused in conjunction with physical barrier guard structures. Physicalbarrier-type guarding can be constructed from painted steel or extrudedaluminum strut structures with either Lexan polycarbonate or wire meshpanels. System guarding can comply with relevant OSHA, ANSI-RIA, andother regulatory agency requirements for this type of equipment.

Applicants specifically incorporate the entire contents of all citedreferences in this disclosure. Further, when an amount, concentration,or other value or parameter is given as either a range, preferred range,or a list of upper preferable values and lower preferable values, thisis to be understood as specifically disclosing all ranges formed fromany pair of any upper range limit or preferred value and any lower rangelimit or preferred value, regardless of whether ranges are separatelydisclosed. Where a range of numerical values is recited herein, unlessotherwise stated, the range is intended to include the endpointsthereof, and all integers and fractions within the range. It is notintended that the scope of the invention be limited to the specificvalues recited when defining a range.

Other embodiments of the present invention will be apparent to thoseskilled in the art from consideration of the present specification andpractice of the present invention disclosed herein. It is intended thatthe present specification and examples be considered as exemplary onlywith a true scope and spirit of the invention being indicated by thefollowing claims and equivalents thereof.

1. An automated system for manufacturing a sputtering target.
 2. Asystem for manufacturing a sputtering target, comprising: a robotic parthandling sub system; a weighing sub system adapted to measure the weightof a part to be manufactured into a sputtering target; a machining subsystem adapted to finish machine a part to be manufactured into asputtering target; a cleaning sub system adapted to clean a part to bemanufactured into a sputtering target; an inspection sub system adaptedto measure dimensions of a part to be manufactured into a sputteringtarget; and a feedback control sub system adapted to provide controlsignals to one or more of the robotic part handling sub system, theweighing sub system, the cleaning sub system, and the inspection subsystem to control processing performed by one or more of the subsystems.
 3. The system of claim 2, further including: a computernumerically controlled machining sub system adapted to finish machineone or more surfaces of a semi-finished part to be manufactured into asputtering target.
 4. The system of claim 2, wherein the robotic parthandling sub system comprises a six axis, modular, electric,servo-driven robot.
 5. The system of claim 1, wherein the robotic parthandling sub system comprises a single carriage, heavy duty, floor-mountrobot transport unit.
 6. The system of claim 5, wherein the robotic parthandling sub system further comprises a six axis, modular, electric,servo-driven robot, the robot transport unit transporting the six axis,modular, electric, servo-driven robot.
 7. The system of claim 1, furthercomprising a product load station, wherein parts to be manufactured intosputtering targets are staged and mounted in fixtures adapted to holdthe parts during further processing.
 8. The system of claim 7, whereinthe product load station comprises seven universal part fixtures, eachadapted to hold a part to be manufactured into a sputtering target. 9.The system of claim 7, wherein the product load station comprises afloor supported bridge crane.
 10. The system of claim 7, wherein theproduct load station comprises a vacuum lifting mechanism.
 11. Thesystem of claim 1, wherein the weighing sub system is adapted to comparethe actual measured weight of a part to be manufactured into asputtering target with an expected weight for the part as stored in thefeedback control sub system.
 12. The system of claim 11, wherein theweighing sub system further includes a marking device adapted to mark apart to be manufactured into a sputtering target.
 13. The system ofclaim 1, wherein the cleaning sub system comprises a degreasing,cleaning, and drying station.
 14. The system of claim 1, furtherincluding a grit blast station adapted to etch at least a portion of apart to be manufactured into a sputtering target.
 15. The system ofclaim 1, further including a coating station adapted to coat at least aportion of a part to be manufactured into a sputtering target.
 16. Thesystem of claim 1, further including a secondary cleaning sub system,the secondary cleaning sub system comprising one or more stations thatare provided in a zone separate from a zone that includes the weighingsub system, the cleaning sub system, and the inspection sub system. 17.The system of claim 16, wherein the secondary cleaning sub systemcomprises an ultrasonic cleaning station, and a nitrogen clean roomstation.
 18. The system of claim 16, wherein a secondary automatic parthandling sub system is provided for transferring a part to bemanufactured into a sputtering target to and/or between one or more ofthe ultrasonic cleaning station and the nitrogen clean room station. 19.A method of manufacturing a sputtering target, comprising: gripping apart to be manufactured into a sputtering target using a robotic parthandling apparatus; weighing the part and comparing the actual weight ofthe part to an expected weight, determining whether further processingof the part should be performed based on the results of comparing theactual weight to the expected weight; finish machining the part todesired dimensions; cleaning the finish machined part; and inspectingthe finish machined part to determine conformance of the dimensions ofthe finish machined part with desired dimensions.
 20. The method ofclaim 19, further including leak testing the finish machined and cleanedpart.
 21. The method of claim 19, further including grit blasting atleast a portion of the part to be manufactured into a sputtering target.22. The method of claim 19, further including moving the finish machinedand cleaned part to a secondary cleaning station wherein furthercleaning is performed including one or more of deionized water cleaningand rinsing, ultrasonic cleaning, and filtered air blow drying.
 23. Themethod of claim 19, further including: providing a system controller;providing an input signal to the system controller indicative of thepresence of a part at a desired location for further processingincluding one or more of gripping the part, weighing the part, finishmachining the part, and cleaning the part; and performing the one ormore processing operations upon receiving a control signal from thesystem controller based on receipt by the system controller of the inputsignal indicative of the presence of the part.